Air Showers and Automatic Roll Air Filters in Semiconductor Cleanrooms: ISO 14644 Compliance in Taiwan, Korea, and the United States
1. Introduction
The semiconductor industry is among the most air-quality-sensitive sectors in the world. Tiny particles invisible to the naked eye can destroy wafers, damage lithography masks, or reduce chip yields. To safeguard multi-billion-dollar fabs in Taiwan, South Korea, and the United States, operators adhere strictly to ISO 14644 cleanroom classifications, which regulate particle counts and airflow stability.
Two technologies are central to this protective environment: air showers, which decontaminate personnel and materials before entering clean zones, and automatic roll prefilters such as the HICLOVER Automatic Roll Air Filter, which stabilize airflow and extend the life of HEPA and ULPA systems.
2. ISO 14644 Standards in Semiconductor Facilities
Semiconductor fabs commonly operate under:
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ISO Class 5: Lithography areas and wafer inspection lines.
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ISO Class 6–7: Wafer etching, assembly, and clean corridors.
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ISO Class 8: Utility and supporting spaces.
These classifications require strict particle control (≥0.5 μm and ≥5 μm) and pressure cascades between zones. Both air showers and prefilter systems are considered essential for validation under ISO audits.
For more, see HICLOVER Clean Air Systems.
3. Air Showers in Semiconductor Environments
Air showers act as the first line of defense before operators enter sensitive areas. In Taiwan and Korea, fabs deploy automated systems where infrared sensors detect entry, triggering high-velocity air jets (20–25 m/s) at 30–60 degree angles to dislodge particles from cleanroom garments.
Key functions:
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Personnel protection: Prevents operator-borne contamination.
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Material handling: Used for tools, carriers, and FOUP containers.
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Access control: Electronic interlocks ensure only decontaminated subjects pass into ISO zones.
4. HICLOVER Automatic Roll Air Filters: Enhancing ISO Compliance
The HICLOVER Automatic Roll Air Filter provides a PLC-controlled prefiltration solution that maintains airflow stability in large semiconductor HVAC systems.
Benefits in Semiconductor Applications:
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Stable Airflow: Keeps ΔP (pressure differentials) consistent across cleanroom boundaries.
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Extended HEPA/ULPA Life: Prefilter rolls capture coarse particles, reducing load on expensive final filters.
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Automation: Media advances automatically when resistance builds, minimizing manual intervention.
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Validation Support: Filter logs support ISO 14644 audits and semiconductor customer compliance programs.
5. Regional Applications
Taiwan
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TSMC and related suppliers maintain ISO Class 5 cleanrooms for photolithography, integrating roll filters to stabilize air showers and HVAC systems across 24/7 operations.
South Korea
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Samsung and SK Hynix fabs utilize ARFs in both air showers and cleanroom corridors to handle ultra-high wafer volumes, aligning with both ISO and SEMI industry standards.
United States
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Intel and Micron facilities adopt ARFs for sustainability purposes, as stable prefiltration reduces fan energy consumption, aligning with corporate ESG goals and state-level green mandates.
For industry-specific deployments, see HICLOVER Solutions.
6. Conclusion
As fabs in Taiwan, Korea, and the U.S. continue to scale to meet global demand, maintaining ISO 14644 compliance is non-negotiable. By combining air showers with HICLOVER Automatic Roll Air Filters, semiconductor manufacturers achieve:
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Reduced contamination risk.
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Stable airflow and cleanroom zoning.
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Lower operational costs through extended filter life.
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Stronger compliance for audits and global supply chain requirements.
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Multilingual SEO Summaries
Français
Dans l’industrie des semi-conducteurs à Taïwan, en Corée et aux États-Unis, les douches à air combinées avec les filtres automatiques HICLOVER assurent la conformité à la norme ISO 14644 et prolongent la durée de vie des filtres HEPA/ULPA.
Русский
В полупроводниковой промышленности Тайваня, Кореи и США воздушные душевые и автоматические фильтры HICLOVER поддерживают стандарты ISO 14644 и снижают расходы на обслуживание чистых помещений.
Español
En la industria de semiconductores en Taiwán, Corea y EE.UU., las duchas de aire y filtros automáticos HICLOVER cumplen con ISO 14644, mejoran la eficiencia y reducen los costos de mantenimiento.
Español (México)
Las fábricas de semiconductores en México también adoptan tecnologías de HICLOVER filtros automáticos y cabinas de aire, siguiendo el modelo de Taiwán, Corea y EE.UU., para cumplir ISO 14644.
한국어
대만, 한국, 미국의 반도체 산업에서 HICLOVER 자동 롤 에어 필터와 에어 샤워는 ISO 14644 규정을 충족하고, 청정실의 에너지 효율과 안정성을 강화합니다.
在半导体行业,尤其是台湾、韩国和美国,风淋室+HICLOVER自动卷绕式空气过滤器已成为通过 ISO 14644 洁净室等级验证的重要保障。风淋室负责人员与物料的去污染,而卷绕式过滤器则保证HVAC系统气流稳定,延长HEPA/ULPA使用寿命,降低能耗与人工维护成本。随着全球晶圆厂产能扩张,该组合方案已被广泛应用于台积电、三星、英特尔等工厂,成为符合ISO与SEMI标准的关键解决方案。
2025-09-24/13:30:41